VL4073 MEMS and NEMS Syllabus:
VL4073 MEMS and NEMS Syllabus – Anna University PG Syllabus Regulation 2021
COURSE OBJECTIVES:
to introduce the concepts of Micro Electro Mechanical devices.
to know the fabrication process of microsystems.
to know the design concepts of micro sensors and micro actuators.
to familiarize concepts of Quantum Mechanics and Nano systems.
UNIT I OVERVIEW
New trends in Engineering and Science: Micro and Nanoscale systems, introduction to design of MEMS and NEMS, MEMS and NEMS – applications, devices and structures. Materials for MEMS: Silicon, Silicon compounds, polymers, metals
UNIT II MEMS FABRICATION TECHNOLOGIES
Microsystem Fabrication Processes: Photolithography, Ion Implantation, Diffusion, Oxidation. Thin Film Depositions: LPCVD, Sputtering, Evaporation, Electroplating; Etching Techniques: Dry and Wet Etching, Electrochemical Etching; Micromachining: Bulk Micromachining, Surface Micromachining, High Aspect- Ratio (LIGA and LIGA-Like) Technology; Packaging: Microsystems Packaging, Essential Packaging Technologies, Selection of Packaging Materials
UNIT III MICRO SENSORS
MEMS Sensors: Design of Acoustic Wave Sensors, Resonant Sensor, Vibratory Gyroscope, Capacitive and Piezo Resistive Pressure Sensors- Engineering Mechanics Behind These Microsensors. Case Study: Piezo-Resistive Pressure Sensor.
UNIT IV MICRO ACTUATORS
Design of Actuators: Actuation Using Thermal Forces, Actuation Using Shape Memory Alloys, Actuation Using Piezoelectric Crystals, Actuation using Electrostatic Forces (Parallel Plate, Torsion Bar, Comb Drive Actuators), Micromechanical Motors and Pumps. Case Study: Comb Drive Actuators.
UNIT V NANOSYSTEMS AND QUANTUM MECHANICS
Atomic Structures and Quantum Mechanics, Molecular and Nanostructure Dynamics: Schrodinger Equation and Wave Function Theory, Density Functional Theory, Nanostructures and Molecular Dynamics, Electromagnetic Fields and their Quantization, Molecular Wires and Molecular Circuits
TOTAL:45 PERIODS
COURSE OUTCOMES:
At the end of this course, the student will be able to:
CO1:Discuss micro sensors
CO2:Explain micro actuators
CO3:Outline nanosystems and Quantum mechanics
CO4:Design micro actuators for different applications
CO5:Analyze atomic structures
REFERENCES
1. Chang Liu, “Foundations of MEMS”, Pearson Education India Limited, 2006.
2. Marc Madou, “Fundamentals of Microfabrication”, CRC Press 1997.
3. Stephen D. Senturia,” Micro System Design”, Kluwer Academic Publishers,2001
4. Sergey Edward Lyshevski, “MEMS and NEMS: Systems, Devices, and Structures” CRC Press, 2002.
5. Tai Ran Hsu ,”MEMS and Microsystems Design and Manufacture” ,Tata Mcraw Hill, 2002.