NT4009 MEMS and NEMS Syllabus:
NT4009 MEMS and NEMS Syllabus – Anna University PG Syllabus Regulation 2021
OBJECTIVES:
To learn about Micro fabrication and scaling of MEMS
To study the Microsystem and materials used in MEMS Technology
To learn about Biological MEMS Technology
UNIT I MEMS MICROFABRICATION
Historical Development of Microelectronics, Evolution of Microsensors, Evolution of MEMS, Emergence of Micromachines, Modeling – Finite Element Analysis, CAD for MEMS, Fabrication – ALD, Lithography Micromachining, LIGA and Micro molding, Saw-IDT Microsensor Fabrication, Packaging – Challenges, Types, Materials and Processes.
UNIT II SCALING OF MEMS
Introduction to Scaling Issues, Scaling effects on a cantilever beam, Scaling of electrostatic actuators, Scaling of thermal actuator, Scaling of Thermal Sensors, mechanics and electrostatistics. Influence of scaling on material properties.
UNIT III MICROSYSTEMS
Microsensors, micro accelerometer, microfluidics, Mechanics for Microsystems design Thermomechanics, fracture mechanics, thin film mechanics. Microfluid mechanics.
UNIT IV MATERIALS FOR MEMS
Materials for mems and pro mems-silicon-metals and polymers-Substrate Materials for MEMS Silicon-quartz-ceramics-Bulk metallic glasses-Sharp Memory alloys, Carbon based MEMS
UNIT V COMMERCIAL AND TECHNOLOGICAL TRENDS
Commercial trends in miniaturization – High density chip analysis-Micro-accelerometers micro resonators-lab-in-chip for DNA and protein analysis – Nano HPLC system nanopatches.
TOTAL : 45 PERIODS
COURSE OUTCOMES:
CO1: Students would gain knowledge in microfabrication techniques and scaling process
CO2: Would acquire knowledge about the Microsystem and materials used in MEMS Technology
CO3: Students would acquire information about recent trends in MEMS and BioMEMS techniques
REFERENCES:
1. Marc Madou, Fundamentals of Microfabrication, CRC Press 1997.
2. MEMS and Microsystems design and manufacture, Tai-Ran Hsu,Tata Mc Graw Hill2011.
3. Sergey Edward Lyshevski, Nano- and Microelectromechanical Systems, CRC Press2000.
4. Vijay Varadan, Xiaoning Jiang, and Vasundara Varadan, Microstereo lithography and other Fabrication Techniques for 3D MEMS, Wiley 2001.
5. Tai-Ran Hsu, MEMS and Microsystems: Design and Manufacture, McGraw-Hill 2001.
6. Ken Gilleo. MEMS/MOEMS Packaging: Concepts, Designs, Materials and Processes. McGraw-Hill, 2005.