MR4007 Micro and Nano Systems Syllabus:
MR4007 Micro and Nano Systems Syllabus – Anna University PG Syllabus Regulation 2021
COURSE OBJECTIVES:
1. To introduce to microsystem of MEMS, material and fabrication technique
2. To provide overview of characterization tools for MEMS
3. To create awareness about principles and applications of various sensors
4. To impart knowledge on different kind of Micro-Nano actuators
5. To introduce Bio MEMS, Microfluidic and Nano position system
UNIT I INTRODUCTION TO MICRO AND NANO TECHNOLOGY
Overview of Nanotechnology and MEMS – Nano Structuring – Nano Particles and Nano Layers – Properties – Science and Synthesis of Nano Materials – Lithography – Micromachining – Photolithography, Deposition Methods, DIRE, LIGA and Laser-Assisted Processing – Overview of Materials for MEMS – Si Wafer, Si Based Products, Polymers.
UNIT II CHARACTERIZATION OF MATERIALS
Principles and Applications of Nano Measuring Systems – Microscopy Techniques, Confocal LASER Scanning Microscopy – Scanning Electron Microscopy – Transmission Electron Microscopy, Scanning Tunnelling Microscopy, Atomic Force Microscopy, Diffraction Techniques – Auger Electron Spectroscopy (AES), X-Ray Photoelectron Spectroscopy (XPS), Electron Probe Micro-Analyser (EPMA) – Application.
UNIT III MICRO AND NANO SENSORS
Si Active Tactile Sensor – Fabric Tactile Sensor and its application – Accelerometer- Capacitive Silicon – Wall in-Tube Flow Sensor and its application- Inertial Sensors – Accelerometer – Gyroscope – Pressure Sensors – Piezoresistive – Capacitive – Micro Channel Heat Sinks – Optical MEMS – Visual Display– Optical Data Switching – RF MEMS – MEMS Variable Capacitors – MEMS Switches – Resonators – Pressure Sensor – Nano Tweezers.
UNIT IV MICRO AND NANO ACTUATORS
Requirement for Micro Actuators – Nano Positioners, Micro Mechanical Testing Apparatus – Classification of Micro Actuator – Electrostatic Distributed Actuator- Force Distance various Actuators– Inch Worm, Zipper and Scratch Drive. Thermal Actuation-Bimorph-Buckle Beam -Frequency and Force Characteristics and Advantages -Electro thermal Actuator – Electro Thermal Relay with Mechanical Latch – Force vs Displacement Curve – Piezoelectric Actuation Advantages – MEMS Switch -Thin Film Bulk Acoustic Resonator (FBAR) – Magnetic Actuation – External Magnetic Field Actuators & Issues – Variable Reluctance Actuators – Shape Memory Actuators – Micro Pump and Micro Fluidics.
UNIT V MICRO AND NANO SYSTEM
Micro Fluidic Systems – Micro Engine Driven by Electrostatically Actuated Comb Drive – Micro Robots and Nano Robots – Micro Insects, Night Vision System, BioMEMS- Principle and Application of Micro and Nano position Systems.
TOTAL: 45 PERIODS
COURSE OUTCOMES:
Upon completion of this course, the students will be able to:
CO1. Understand material and fabrication involved in Microsystem.
CO2. Explain techniques to visualize and measure geometrical features of MEMS system and chemical composition.
CO3. Select a type of sensors based on application with working knowledge and principles.
CO4. Select a type of factor based on application with knowledge of working principle.
CO5. Discuss on Micro fluidic, Bio MEMS and Nano position systems.
REFERENCES:
1. Mahalik N P, “MEMS”, McGraw Hill (India), 2009
2. Marc Madou, “Fundamentals of Micro Fabrication”, CRC Press, 2011.
3. Mohamed Gad-el-Hak, “MEMS Handbook”, CRC Press, 2006,
4. Sami Franssila, Introduction to Micro Fabrication, John Wiley & Sons Ltd, 2010.
5. Tai – Ran Hsu, “MEMS and Microsystems Design and Manufacture”, Tata-McGraw Hill, New Delhi, 2007.
6. Waqar Ahmed and Mark J. Jackson, “Emerging Nanotechnologies for Manufacturing”, Elsevier Inc., 2014.