MF4009 Mems and Nanotechnology Syllabus:
MF4009 Mems and Nanotechnology Syllabus – Anna University PG Syllabus Regulation 2021
OBJECTIVES:
(1) To inspire the students to expect to the trends in manufacturing of micro components
(2) Familiarise the students with various fabrication techniques for micro components.
(3) Acquaint them with various sensors and actuators
(4) Introduce them the various methods of developing nano materials
(5) Make them understand characterization tools
UNIT I OVER VIEW OF MEMS AND MICROSYSTEMS
Definition – historical development – properties, design and fabrication micro-system, microelectronics, working principle, applications and advantages of micro system. Substrates and wafers, silicon as substrate material, mechanical properties of Si, Silicon Compounds – silicon piezo resistors, Gallium arsenide, quartz, polymers for MEMS, conductive polymers.
UNIT II FABRICATION PROCESSES AND MICRO SYSTEM PACKAGING
Photolithography, photo resist applications, light sources, ion implantation, diffusion–Oxidation – thermal oxidation, silicon dioxide, chemical vapour deposition, sputtering – deposition by epitaxy – etching – bulk and surface machining – LIGA process – LASER, Electron beam, Ion beam processes – Mask less lithography. Micro system packaging –packaging design– levels of micro system packaging -die level, device level and system level – interfaces in packaging – packaging technologies- Assembly of Microsystems
UNIT III MICRO DEVICES
Sensors – classification – signal conversion ideal characterization of sensors micro actuators, mechanical sensors – measurands – displacement sensors, pressure sensor, flow sensors, Accelerometer, chemical and bio sensor – sensitivity, reliability and response of micro-sensor – micro actuators – applications.
UNIT IV SCIENCE AND SYNTHESIS OF NANO MATERIALS
Classification of nano structures – Effects of nano scale dimensions on various properties – structural, thermal, chemical, magnetic, optical and electronic properties fluid dynamics –Effect of nano scale dimensions on mechanical properties – vibration, bending, fracture Nanoparticles, Sol-Gel Synthesis, Inert Gas Condensation, High energy Ball Milling, Plasma Synthesis, Electro deposition and other techniques. Synthesis of Carbon nanotubes – Solid carbon source-based production techniques – Gaseous carbon source-based production techniques – Diamond like carbon coating. Top down and bottom up processes.
UNIT V CHARACTERIZATION OF NANO MATERIALS
Nano-processing systems – Nano measuring systems – characterization – analytical imaging techniques – microscopy techniques, electron microscopy scanning electron microscopy, confocal LASER scanning microscopy – transmission electron microscopy, transmission electron microscopy, scanning tunnelling microscopy, atomic force microscopy, diffraction techniques – spectroscopy techniques – Raman spectroscopy, 3D surface analysis – Mechanical, Magnetic and thermal properties – Nano positioning systems.
OUTCOMES:
At the end of this course the students are expected
(1) Realise the need of micro electromechanical systems.
(2) Develop a knowledge to select a sensor for an application
(3) Develop a nano material
(4) characterize the Nano material
(5) Develop an Electromechanical systems
REFERENCES:
1. Charles P Poole, Frank J Owens, Introduction to Nano technology, John Wiley and Sons, 2003
2. Julian W. Hardner Micro Sensors, Principles and Applications, CRC Press 1993.
3. Mark Madou , Fundamentals of Microfabrication, CRC Press, New York, 1997.
4. Mohamed Gad-el-Hak, MEMS Handbook, CRC press, 2006, ISBN : 8493-9138-5
5. Norio Taniguchi, Nano Technology, Oxford University Press, New York, 2003
6. Sami Franssila, Introduction to Micro fabrication, John Wiley & sons Ltd, 2004. ISBN:470-85106-6
7. Tai – Ran Hsu, MEMS and Microsystems Design and Manufacture, Tata-McGraw Hill, New Delhi, 2002.
8. Waqar Ahmed and Mark J. Jackson, Emerging Nanotechnologies for Manufacturing, Elsevier Inc.,2013,ISBN : 978-93-82291-39-8