ET4018 Mems Design: Sensors and Actuators Syllabus:
ET4018 Mems Design: Sensors and Actuators Syllabus – Anna University PG Syllabus Regulation 2021
OBJECTIVES:
To analyse the properties of materials, microstructure and fabrication methods.
To design and modeling of Electrostatic sensors and actuators.
To teach the characterizing thermal sensors and actuators through design and modeling.
To understand the fundamentals of piezoelectric sensors and actuators through exposure to different MEMS and NEMS devices
UNIT I MICRO-FABRICATION, MATERIALS AND ELECTRO-MECHANICAL CONEPTS
Overview of micro fabrication – Silicon and other material based fabrication processes – Concepts: Conductivity of semiconductors-Crystal planes and orientation-stress and strainflexural beam bending analysis- torsional deflections-Intrinsic stress- resonant frequency and quality factor.
UNIT II ELECTROSTATIC SENSORS AND ACTUATION
Principle, material, design and fabrication of parallel plate capacitors as electrostatic sensors and actuators-Applications
UNIT III THERMAL SENSING AND ACTUATION
Principle, material, design and fabrication of thermal couples, thermal bimorph sensors, thermal resistor sensors-Applications.
UNIT IV PIEZOELECTRIC SENSING AND ACTUATION
Piezoelectric effect-cantilever piezo electric actuator model-properties of piezoelectric materials Applications.
UNIT V CASE STUDIES
Piezoresistive sensors, Magnetic actuation, Micro fluidics applications, Medical applications, Optical MEMS.-NEMS Devices
TOTAL: 45 PERIODS
OUTCOMES:
At the end of this course, the students will demonstrate the ability
CO1: To analyse the learning process to design of micro sensors, embedded sensors & actuators
CO2: To analyse the electrostatic sensors and actuators through MEMS and NEMS devices
CO3: To analyse the thermal sensors and actuators through MEMS and NEMS devices
CO4: To analyse the piezoelectric sensors and actuators through MEMS and NEMS
CO5: Design of piezoresistive sensors for biomedical and micro fluidic applications
REFERENCES:
1. Chang Liu, “Foundations of MEMS”, Pearson International Edition, 2006.
2. Marc Madou , “Fundamentals of microfabrication”,CRC Press, 1997.
3. Boston , “Micromachined Transducers Source book”,WCB McGraw Hill, 1998.
4. M.H.Bao “Micromechanical transducers: Pressure sensors, accelerometers and gyroscopes”, Elsevier, Newyork, 2000.