ET4015 MEMS and NEMS Technology Syllabus:
ET4015 Mems and Nems Technology Syllabus – Anna University PG Syllabus Regulation 2021
COURSE OBJECTIVES:
1. To introduce the diverse technological and functional approaches of MEMS/NEMS and applications.
2. To understand the microstructures and fabrication methods.
3. To provide an insight of micro and nano sensors, actuators.
4. To emphasis the need for NEMS techology.
5. To update the ongoing trends and real time applications of MEMS and NEMS technology.
UNIT I INTRODUCTION TO MEMS and NEMS
Overview of Micro electro mechanical systems and Nano Electro mechanical systems, devices and technologies, Laws of scaling- Survey of materials- Smart Sensors-Applications of MEMS and NEMS.
UNIT II MICRO-MACHINING AND MICROFABRICATION TECHNIQUES
Photolithography- Film deposition, Etching Processes- wafer bonding- Bulk micro machining, silicon surface micro machining- LIGA process.
UNIT III MICRO SENSORS AND MICRO ACTUATORS
Transduction mechanisms in different energy domain- Micromachined capacitive, Piezoelectric , piezoresistive and Electromechanical and thermal sensors/actuators and applications
UNIT IV NEMS TECHNOLOGY
Atomic scale precision engineering- Nano Fabrication techniques – NEMS in measurement, sensing, actuation and systems design.
UNIT V MEMS and NEMS APPLICATION
Introduction to Micro/Nano Fluids and applications- Bio MEMS- Optical NEMS- Micro and Nano motors- Recent trends in MEMS and NEMS.
TOTAL: 45 PERIODS
COURSE OUTCOMES:
At the end of this course, the students will have the ability to
CO1: Explain the material properties and the significance of MEMS and NEMS for industrial automation.
CO2: Demonstrate knowledge delivery on micromachining and micro fabrication.
CO3: Apply the fabrication mechanism for MEMS sensor and actuators.
CO4: Apply the concepts of MEMS and NEMS to models ,simulate and process the sensors and actuators.
CO5: Improved Employability and entrepreneurship capacity due to knowledge up gradation on MEMS and NEMS technology.
REFERENCES:
1. Chang Liu, “Foundations of MEMS”, Pearson International Edition, 2006.
2. Marc F madou“ Fundamentals of micro fabrication” CRC Press 2002 2nd Edition Marc Madou.
3. M.H.Bao “Micromechanical transducers :Pressure sensors, accelerometers and gyroscopes”,Elsevier, Newyork, 2000.
4. Maluf, Nadim “An introduction to Micro Electro-mechanical Systems Engineering “AR Tech house, Boston 2000.
5. Mohamed Gad – el – Hak “MEMS Handbook” Edited CRC Press 2002 2. Sabriesolomon “Sensors Handbook”, Mc Graw Hill 1998.
6. Tai-.Ran Hsu, “MEMS and Microsystems: design , manufacture, and Nanoscale”- 2nd Edition, John Wiley & Sons, Inc., Hoboken, New Jersey, 2008
7. Lyshevski, S.E. “ Nano- and Micro-Electromechanical Systems: Fundamentals of Nano-and Microengineering “ (2nd ed.). CRC Press,2005.